iiRecord
Agentic AI Atlas · Nanofabrication Process Audit
workflow:nanofabrication-process-audita5c.ai
II.
Workflow JSON

workflow:nanofabrication-process-audit

Structured · live

Nanofabrication Process Audit json

Inspect the normalized record payload exactly as the atlas UI reads it.

File · workflows/workflows/workflows-nanotech.yamlCluster · workflows
Record JSON
{
  "id": "workflow:nanofabrication-process-audit",
  "_kind": "Workflow",
  "_file": "workflows/workflows/workflows-nanotech.yaml",
  "_cluster": "workflows",
  "attributes": {
    "displayName": "Nanofabrication Process Audit",
    "workflowKind": "governance",
    "triggerType": "scheduled",
    "typicalCadence": "monthly",
    "complexity": "single-team",
    "description": "Audits nanofabrication cleanroom processes for yield and\nrepeatability -- reviewing lithography overlay accuracy, etching\nuniformity across wafer maps, deposition thickness control via\nellipsometry trending, particle contamination counts, equipment PM\ncompliance, and correlating process parameter drift with device yield\nfallout. Produces corrective action requests for out-of-spec\nprocesses. Excludes process development.\n"
  },
  "outgoingEdges": [
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "role:staff-engineer",
      "kind": "involves_role",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "role:data-scientist",
      "kind": "involves_role",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "role:performance-profiler",
      "kind": "involves_role",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "skill-area:observability-pipeline",
      "kind": "requires_skill_area",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "skill-area:python-data-pipelines",
      "kind": "requires_skill_area",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "domain:nanotechnology",
      "kind": "applies_to_domain",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "domain:materials-science",
      "kind": "applies_to_domain",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "responsibility:data-quality-monitoring",
      "kind": "triggers_responsibility",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "responsibility:triage-incoming-issues",
      "kind": "triggers_responsibility",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "org-unit:quality-engineering",
      "kind": "performed_by_org_unit",
      "attributes": {}
    },
    {
      "from": "workflow:nanofabrication-process-audit",
      "to": "org-unit:research-engineering",
      "kind": "performed_by_org_unit",
      "attributes": {}
    }
  ],
  "incomingEdges": []
}