{
  "id": "lib-skill:nanotechnology--ebl-process-controller",
  "_kind": "LibrarySkill",
  "_file": "generated-library/skills.yaml",
  "_cluster": "generated-library",
  "attributes": {
    "displayName": "ebl-process-controller",
    "description": "Electron Beam Lithography skill for high-resolution nanopatterning with dose optimization and proximity effect correction",
    "libraryPath": "library/specializations/domains/science/nanotechnology/skills/ebl-process-controller/SKILL.md",
    "specialization": "nanotechnology",
    "contentSummary": "# EBL Process Controller\n\n## Purpose\n\nThe EBL Process Controller skill provides comprehensive electron beam lithography process control, enabling high-resolution nanopatterning through dose optimization, proximity effect correction, and critical dimension control.\n\n## Capabilities\n\n- Pattern"
  },
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