{
  "id": "lib-process:nanotechnology--nanodevice-integration",
  "_kind": "LibraryProcess",
  "_file": "generated-library/processes.yaml",
  "_cluster": "generated-library",
  "attributes": {
    "displayName": "nanodevice-integration",
    "description": "Nanodevice Integration Process Flow - Design and validate complete nanodevice fabrication\nprocess flows integrating multiple unit processes (lithography, deposition, etching) with process\ncompatibility analysis, yield monitoring, failure mode identification, and iterative optimization\nof critical interfaces.",
    "libraryPath": "library/specializations/domains/science/nanotechnology/nanodevice-integration.js",
    "specialization": "nanotechnology",
    "references": [
      "- National Nanotechnology Coordinated Infrastructure (NNCI): https://nnci.net/\n- SEMI Standards for Nanoelectronics: https://www.semi.org/\n- Focused Ion Beam (FIB) Systems: https://www.fei.com/technologies/focused-ion-beam/"
    ],
    "example": "const result = await orchestrate('specializations/domains/science/nanotechnology/nanodevice-integration', {\n  deviceArchitecture: { type: 'nanowire-FET', layers: 5, criticalDimension: 20 },\n  processModules: ['lithography', 'ALD', 'etch', 'metallization'],\n  yieldTarget: 85,\n  criticalInterfaces: ['gate-stack', 'source-drain-contact']\n});",
    "usesAgents": [
      "integration-engineer",
      "compatibility-analyst",
      "interface-scientist",
      "interface-engineer",
      "yield-engineer",
      "reliability-engineer",
      "test-structure-engineer",
      "metrology-planner",
      "validation-engineer",
      "technical-writer"
    ]
  },
  "outgoingEdges": [
    {
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      "to": "skill-area:mathematical-reasoning",
      "kind": "lib_requires_skill_area",
      "attributes": {
        "weight": 1
      }
    },
    {
      "from": "lib-process:nanotechnology--nanodevice-integration",
      "to": "skill-area:physics-simulation",
      "kind": "lib_requires_skill_area",
      "attributes": {
        "weight": 0.7
      }
    },
    {
      "from": "lib-process:nanotechnology--nanodevice-integration",
      "to": "skill-area:data-analysis",
      "kind": "lib_requires_skill_area",
      "attributes": {
        "weight": 0.5
      }
    },
    {
      "from": "lib-process:nanotechnology--nanodevice-integration",
      "to": "domain:nanotechnology",
      "kind": "lib_applies_to_domain",
      "attributes": {
        "weight": 1
      }
    },
    {
      "from": "lib-process:nanotechnology--nanodevice-integration",
      "to": "role:research-engineer",
      "kind": "lib_involves_role",
      "attributes": {
        "weight": 1
      }
    },
    {
      "from": "lib-process:nanotechnology--nanodevice-integration",
      "to": "workflow:experiment-design",
      "kind": "lib_implements_workflow",
      "attributes": {
        "weight": 1
      }
    },
    {
      "from": "lib-process:nanotechnology--nanodevice-integration",
      "to": "specialization:nanotechnology",
      "kind": "lib_belongs_to_specialization",
      "attributes": {
        "weight": 0.9
      }
    },
    {
      "from": "lib-process:nanotechnology--nanodevice-integration",
      "to": "lib-agent:electrical-engineering--reliability-engineer",
      "kind": "uses_agent",
      "attributes": {
        "weight": 0.8
      }
    },
    {
      "from": "lib-process:nanotechnology--nanodevice-integration",
      "to": "lib-agent:meta--technical-writer",
      "kind": "uses_agent",
      "attributes": {
        "weight": 0.8
      }
    }
  ],
  "incomingEdges": []
}